Identification of Self-Buffer Layer on GaN/glass Films Grown by Reactive Sputtering

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dc.contributor.authorde Oliveira R.S.
dc.contributor.authorFolli H.A.
dc.contributor.authorHorta I.M.
dc.contributor.authorDamasceno B.S.
dc.contributor.authorAugstrose J.H.C.
dc.contributor.authorMiyakawa W.
dc.contributor.authorPereira A.L.J.
dc.contributor.authorMassi M.
dc.contributor.authorda Silva Sobrinho A.S.
dc.contributor.authorLeite D.M.G.
dc.date.accessioned2024-03-12T19:11:44Z
dc.date.available2024-03-12T19:11:44Z
dc.date.issued2023
dc.description.abstract© 2023 Universidade Federal de Sao Carlos. All rights reserved.This work reports on the properties of GaN films grown by reactive magnetron sputtering onto glass substrate kept at relatively low temperature (400°C), using different RF power applied to the Ga target. Their structural, morphological, vibrational and optical properties were characterized by X-ray diffraction, atomic force and scanning electron microscopies, Raman spectroscopy and UV-vis spectrophotometry. The films have wurtzite phase with strong preferential orientation in the c-axis direction. Moreover, two clear contributions to the (0002) diffraction peak could be found, indicating the presence of two different morphologies, which were discussed in terms of the formation of an intermediate layer between the substrate and a dominating columnar-like microstructured film.
dc.description.volume26
dc.identifier.doi10.1590/1980-5373-MR-2023-0005
dc.identifier.issn1980-5373
dc.identifier.urihttps://dspace.mackenzie.br/handle/10899/34191
dc.relation.ispartofMaterials Research
dc.rightsAcesso Aberto
dc.subject.otherlanguagebuffer layer
dc.subject.otherlanguageGaN
dc.subject.otherlanguageglass substrate
dc.subject.otherlanguagereactive sputtering
dc.titleIdentification of Self-Buffer Layer on GaN/glass Films Grown by Reactive Sputtering
dc.typeArtigo
local.scopus.citations1
local.scopus.eid2-s2.0-85167866524
local.scopus.subjectAtomic force
local.scopus.subjectGaN film
local.scopus.subjectGlass films
local.scopus.subjectGlass substrates
local.scopus.subjectLows-temperatures
local.scopus.subjectProperty
local.scopus.subjectReactive magnetron sputtering
local.scopus.subjectRF power
local.scopus.subjectUV-vis spectrophotometry
local.scopus.subjectX- ray diffractions
local.scopus.updated2024-12-01
local.scopus.urlhttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85167866524&origin=inward
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