Design and analytical studies of a DLC thin-film piezoresistive pressure microsensor

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dc.contributor.authorRasia L.A.
dc.contributor.authorLeal G.
dc.contributor.authorKoberstein L.L.
dc.contributor.authorFurlan H.
dc.contributor.authorMassi M.
dc.contributor.authorFraga M.A.
dc.date.accessioned2024-03-13T00:50:49Z
dc.date.available2024-03-13T00:50:49Z
dc.date.issued2017
dc.description.abstract© 2017, Springer International Publishing AG.Diamond-like carbon (DLC) thin films have been investigated for a wide range of applications due to their excellent electrical and mechanical properties. In the last decade, several researches and development activities have been conducted on the use of these thin films as piezoresistors in MEMS pressure sensors. This paper provides an overview on the design of a piezoresistive pressure sensor constituted of a silicon circular diaphragm with four DLC thin-film piezoresistors arranged in the Wheatstone bridge configuration. The sensor was designed from analytical formulas found in the literature.
dc.description.firstpage433
dc.description.lastpage443
dc.description.volume742
dc.identifier.doi10.1007/978-3-319-66963-2_39
dc.identifier.issn1865-0929
dc.identifier.urihttps://dspace.mackenzie.br/handle/10899/35839
dc.relation.ispartofCommunications in Computer and Information Science
dc.rightsAcesso Restrito
dc.subject.otherlanguageAnalytical solution
dc.subject.otherlanguageDesign
dc.subject.otherlanguageDiamond-like carbon (DLC)
dc.subject.otherlanguagePiezoresistive pressure sensor
dc.titleDesign and analytical studies of a DLC thin-film piezoresistive pressure microsensor
dc.typeArtigo de evento
local.scopus.citations4
local.scopus.eid2-s2.0-85030032271
local.scopus.subjectCircular diaphragms
local.scopus.subjectDevelopment activity
local.scopus.subjectDiamond like carbon
local.scopus.subjectElectrical and mechanical properties
local.scopus.subjectMEMS pressure sensor
local.scopus.subjectPiezoresistive pressure sensors
local.scopus.subjectPressure microsensors
local.scopus.subjectWheatstone bridges
local.scopus.updated2024-05-01
local.scopus.urlhttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85030032271&origin=inward
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