Design and analytical studies of a DLC thin-film piezoresistive pressure microsensor
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Artigo de evento
Date
2017
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Communications in Computer and Information Science
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4
Authors
Rasia L.A.
Leal G.
Koberstein L.L.
Furlan H.
Massi M.
Fraga M.A.
Leal G.
Koberstein L.L.
Furlan H.
Massi M.
Fraga M.A.
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Abstract
© 2017, Springer International Publishing AG.Diamond-like carbon (DLC) thin films have been investigated for a wide range of applications due to their excellent electrical and mechanical properties. In the last decade, several researches and development activities have been conducted on the use of these thin films as piezoresistors in MEMS pressure sensors. This paper provides an overview on the design of a piezoresistive pressure sensor constituted of a silicon circular diaphragm with four DLC thin-film piezoresistors arranged in the Wheatstone bridge configuration. The sensor was designed from analytical formulas found in the literature.
Description
Keywords
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Circular diaphragms , Development activity , Diamond like carbon , Electrical and mechanical properties , MEMS pressure sensor , Piezoresistive pressure sensors , Pressure microsensors , Wheatstone bridges