Fabrication and characterization of silicon nitride waveguides for mid-infrared applications

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dc.contributor.authorDe Oliveira E.C.
dc.contributor.authorGerosa R.M.
dc.contributor.authorPhelan C.
dc.contributor.authorDe Matos C.J.S.
dc.date.accessioned2024-03-12T23:51:37Z
dc.date.available2024-03-12T23:51:37Z
dc.date.issued2019
dc.description.abstract© 2019 IEEE.This work describes the fabrication and characterization of silicon nitride waveguides for operation in the 2 μm to 3 μm range. Fabrication was carried out via PECVD and lithography techniques. Transmission losses were measured, with a tunable laser, to be ~20 dB between 2.0 μm and 2.3 μm, increasing to ~30 dB between 2.3 μm and 2.6 μm. Beyond 2.8 μm no transmission was detected, possibly due to the presence of hydrogen in the silicon nitride material (leading to absorption). Losses in the 2.0 μm to 2.6 μm range are believed to be a consequence of scattering, as the waveguides presented an RMS roughness of ~5 nm. Future work will focus on reducing these sources of absorption and scattering so that operation can be extended to the 4 μm range.
dc.identifier.doi10.1109/SBFoton-IOPC.2019.8910236
dc.identifier.urihttps://dspace.mackenzie.br/handle/10899/35185
dc.relation.ispartof2019 SBFoton International Optics and Photonics Conference, SBFoton IOPC 2019
dc.rightsAcesso Restrito
dc.subject.otherlanguagegraphene plasmons
dc.subject.otherlanguageintegrated waveguides
dc.subject.otherlanguagemid-infrared
dc.subject.otherlanguagesilicon nitride
dc.subject.otherlanguagesilicon photonics
dc.titleFabrication and characterization of silicon nitride waveguides for mid-infrared applications
dc.typeArtigo de evento
local.scopus.citations1
local.scopus.eid2-s2.0-85076428207
local.scopus.subjectAbsorption and scatterings
local.scopus.subjectFabrication and characterizations
local.scopus.subjectGraphene plasmons
local.scopus.subjectIntegrated waveguides
local.scopus.subjectMidinfrared
local.scopus.subjectNitride materials
local.scopus.subjectSilicon nitride waveguides
local.scopus.subjectTransmission loss
local.scopus.updated2024-05-01
local.scopus.urlhttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85076428207&origin=inward
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