AlGaN films grown by reactive magnetron sputtering on glass substrates with different Al content

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dc.contributor.authorHorta I.M.
dc.contributor.authorDamasceno B.S.
dc.contributor.authorde Oliveira R.S.
dc.contributor.authorPereira A.L.D.J.
dc.contributor.authorMassi M.
dc.contributor.authorSobrinho A.S.D.S.
dc.contributor.authorLeite D.M.G.
dc.date.accessioned2024-03-12T19:09:02Z
dc.date.available2024-03-12T19:09:02Z
dc.date.issued2023
dc.description.abstract© 2023AlGaN thin films with different Al content were grown via reactive magnetron sputtering onto glass substrates using independent Al and Ga targets. The quality of the films was analyzed using X-ray diffraction, Raman spectroscopy, energy dispersive spectroscopy, and UV-Vis spectrophotometry. The results show that the Al content can be effectively controlled by tuning the power ratio applied to the independent targets in different absolute situations. Moreover, all produced samples presented only wurtzite structure without indication of other phases on both X-ray diffraction and Raman spectroscopy analyses. Overall, the properties of the films had a strong correlation with the composition, such as the expected blue shift of the optical bandgap and the Raman phonon modes, and the lattice cell expansion with increasing Al content. In addition, a higher c-orientation texture together with a sharper diffraction peak were observed for samples with more Al.
dc.description.volume40
dc.identifier.doi10.1016/j.surfin.2023.103023
dc.identifier.issn2468-0230
dc.identifier.urihttps://dspace.mackenzie.br/handle/10899/34047
dc.relation.ispartofSurfaces and Interfaces
dc.rightsAcesso Restrito
dc.subject.otherlanguageAlGaN
dc.subject.otherlanguageGaN
dc.subject.otherlanguageGlass
dc.subject.otherlanguageSemiconductor
dc.subject.otherlanguagesputtering
dc.subject.otherlanguageThin film
dc.titleAlGaN films grown by reactive magnetron sputtering on glass substrates with different Al content
dc.typeArtigo
local.scopus.citations4
local.scopus.eid2-s2.0-85161356858
local.scopus.updated2025-04-01
local.scopus.urlhttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85161356858&origin=inward
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