An Approach on the Use of Co-sputtered W-DLC Thin Films as Piezoresistive Sensing Materials

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dc.contributor.authorLeal G.
dc.contributor.authorFurlan H.
dc.contributor.authorMassi M.
dc.contributor.authorFraga M.A.
dc.date.accessioned2024-03-12T19:15:21Z
dc.date.available2024-03-12T19:15:21Z
dc.date.issued2022
dc.description.abstract© 2022 Bentham Science Publishers.Background: Miniaturized piezoresistive sensors, particularly strain gauges, pressure sensors, and accelerometers, have been used for measurements and control applications in various fields, such as automotive, aerospace, industrial, biomedical, sports, and many more. A variety of different materials have been investigated for the development of these sensors. Among them, diamond-like carbon (DLC) thin films have emerged as one of the most promising piezoresistive sensing materials due to their excellent mechanical properties, such as hardness and high Young’s modulus. At the same time, metal doping has been studied to enhance their electrical properties. Objective: This article explores the use of co-sputtered tungsten-doped diamond-like carbon (WDLC) thin films as microfabricated strain gauges or piezoresistors. Methods: Different serpentine thin-film resistors were microfabricated on co-sputtered W-DLC thin films using photolithography, metallization, lift-off and RIE (reactive ion etching) processes. In order to evaluate their piezoresistive sensing performance, Gauge Factor (GF) measurements were carried out at room temperature using the cantilever beam method. Results: GF values obtained in this study for co-sputtered W-DLC thin films are comparable to those reported for W-DLC films produced and characterized by other techniques, which indicates the feasibility of our approach to using them as sensing materials in piezoresistive sensors. Conclusions: W-DLC thin films produced by the co-magnetron sputtering technique can be considered as sensing materials for miniaturized piezoresistive sensors due to the following key advantages: (i) easy and well-controlled synthesis method, (ii) good piezoresistive properties exhibiting a GF higher than metals, and (iii) thin-film resistors formed by a simple microfabrication process.
dc.description.firstpage3
dc.description.issuenumber1
dc.description.lastpage9
dc.description.volume15
dc.identifier.doi10.2174/2666145414666210608130226
dc.identifier.issn2666-1454
dc.identifier.urihttps://dspace.mackenzie.br/handle/10899/34383
dc.relation.ispartofCurrent Materials Science
dc.rightsAcesso Restrito
dc.subject.otherlanguageco-sputtering
dc.subject.otherlanguageDiamond-like carbon
dc.subject.otherlanguagemetal doping
dc.subject.otherlanguagemicrosystem technology
dc.subject.otherlanguagepiezoresistive sensors
dc.subject.otherlanguagethin films
dc.subject.otherlanguagethin-film resistors
dc.titleAn Approach on the Use of Co-sputtered W-DLC Thin Films as Piezoresistive Sensing Materials
dc.typeArtigo
local.scopus.citations0
local.scopus.eid2-s2.0-85127843810
local.scopus.subjectCosputtering
local.scopus.subjectDiamond like carbon
local.scopus.subjectDiamond-like carbon thin films
local.scopus.subjectMetal-doping
local.scopus.subjectMicro systems technologies
local.scopus.subjectPiezoresistive sensing
local.scopus.subjectPiezoresistive sensors
local.scopus.subjectSensing material
local.scopus.subjectThin film resistors
local.scopus.subjectThin-films
local.scopus.updated2024-12-01
local.scopus.urlhttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85127843810&origin=inward
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