Sputtered Piezoelectric Films as Materials for Flexible Devices and Sensors: A Review

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dc.contributor.authorFraga M.A.
dc.contributor.authorMassi M.
dc.contributor.authorPessoa R.S.
dc.date.accessioned2024-03-12T19:07:35Z
dc.date.available2024-03-12T19:07:35Z
dc.date.issued2024
dc.description.abstract© 2001-2012 IEEE.The demand for innovative and versatile technologies in wearable electronics has catalyzed research into functional materials that can seamlessly integrate with complex and curved surfaces. Recent advances in sputtering technology have not only enabled precise control over the thin-film composition and crystal structure on various substrates, including flexible ones, but also made it easier to optimize a sensor's performance for specific applications. Piezoelectric thin films produced by sputtering techniques are recognized for their exceptional electromechanical properties and offer a promising approach for developing low-cost, high-performance flexible sensors. These sensors have a wide range of applications, from wearable devices to environmental monitoring. In this article, we present and discuss the use of sputtered piezoelectric thin films as materials for flexible devices and sensors. The growth of these thin films through sputtering, their piezoelectric properties, and the sensor fabrication processes are detailed, with a focus on challenges that remain to be addressed. We also discuss the difficulties in optimizing film performance while ensuring mechanical durability, emphasizing the importance of material engineering. Additionally, the broad spectrum of applications for flexible devices and sensors is highlighted.
dc.description.firstpage28
dc.description.issuenumber1
dc.description.lastpage39
dc.description.volume24
dc.identifier.doi10.1109/JSEN.2023.3334097
dc.identifier.issn1558-1748
dc.identifier.urihttps://dspace.mackenzie.br/handle/10899/33972
dc.relation.ispartofIEEE Sensors Journal
dc.rightsAcesso Restrito
dc.subject.otherlanguageFlexible electronics
dc.subject.otherlanguagepiezoelectric devices
dc.subject.otherlanguagesensors
dc.subject.otherlanguagesputtering
dc.subject.otherlanguagethin films
dc.titleSputtered Piezoelectric Films as Materials for Flexible Devices and Sensors: A Review
dc.typeArtigo
local.scopus.citations4
local.scopus.eid2-s2.0-85178019499
local.scopus.subjectFlexible device
local.scopus.subjectFlexible sensor
local.scopus.subjectMechanical sensors
local.scopus.subjectPerformance
local.scopus.subjectPiezoelectric film
local.scopus.subjectPiezoelectric thin films
local.scopus.subjectSensor phenomenon and characterizations
local.scopus.subjectSputtering
local.scopus.subjectThin-films
local.scopus.updated2025-04-01
local.scopus.urlhttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85178019499&origin=inward
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